San Francisco Bay Area IEEE Nanotechnology Council
Nanoscale Metrology in 3D; Atom Probe Tomography
Dr. Pritesh Parikh,
Senior Scientist, Eurofins/Nanolab Technologies
Thursday, August 31, 2023
11:30: Networking, Pizza & Drinks;
Noon — 1 pm: Seminar
Please register on Eventbrite before 9:30 AM on August 31
Walk-In attendance is welcomed but discouraged – you may be turned away if the event capacity is filled
Please assist us in our event planning!*
If you decide not to attend… – please cancel reservations by 9:30 AM on August 31 **
810 Kifer Road, Sunnyvale
==> Use corner entrance: Kifer Road / San Lucar Court
==> Do not enter at main entrance on Kifer Road
(Parking: on street or in parking lot behind EAG)
The ability to observe chemical distribution of individual elements at the nanoscale and in three dimensions (3D) provides a unique opportunity to understand current and future material challenges across a broad scope of industries. In this respect, Atom Probe Tomography (APT) is an analytical tool that allows such an investigation at high chemical sensitivity and simultaneously at small length scales.
APT will continue to play a pivotal role in enabling novel material development and design, ranging from semiconductors and III-Vs to zeolites, batteries, catalysis and even biological samples. While APT is heavily used in research institutions and government laboratories worldwide, its popularity in industry is limited towards commercial applications.
At Eurofins Nanolab Technologies, the only industry provider of APT service in North America, we help to support research and development activities and service needs for industry partners across the globe. This provides us with a unique perspective to understand material analysis requirements across different sectors.
The presentation will introduce the principles of APT, discuss its capabilities, industry uses, specific application cases and also discuss current efforts and future outlook in enabling advanced materials analysis using APT.
Dr. Pritesh Parikh is Senior Scientist at Nanolab Technologies, a Eurofins Company.
Dr. Pritesh Parikh has been working as a Senior Scientist at Eurofins Nanolab Technologies for the past 3 years, independently leading the efforts in using Atom Probe Tomography to better understand materials in 3D and at nanoscale dimensions.
Pritesh is also a reviewer board member for MPDI group of journals (Energies) and a co-organizer for the MRS Fall 2023 Atom Probe Symposium.
Pritesh received his PhD from the Department of Nanoengineering at UC, San Diego in 2019, working on understanding semiconductors and energy materials, lithium batteries and perovskite based solar panels using atom probe tomography. While working with Pacific Northwest National Laboratory during his graduate studies, Pritesh has gained experience in a multitude of different material systems for atom probe tomography and continues to apply this expertise towards new projects at Nanolab.
As an energy enthusiast, Pritesh hopes to continue to contribute to the field of 3D nanoscale analysis with focus towards green energy applications.
If you have questions or problems with your registration, please contact LincolnBourne@gmail.com
* Please help us manage our event planning. When we have many walk-in attendees, it is difficult for us to order the proper amount of food for lunch.
** Tickets cancelled by 8 PM on November 18 will have payments refunded*** Note: Eventbrite Fees will not be refunded
More tech info: Nanoscale Metrology in 3D; Atom Probe Tomography
Ideal Uses of Atom Probe Tomography (APT)
3D structure analysis such as FinFET, PMOS cap layer, 3D NAND, curved or non-uniform grain boundaries in photovoltaics.
Nanoscale precipitates and matrix analysis for composition and chemical identification such as metallic alloys (Al 7075, shape memory, Ti).
Light element analysis — Be, B, Li, C and Al, such as Li-ion batteries.
Low concentration dopants in 2D and 3D for LEDs, finfets, 3D NAND memory and surface coatings of Li-ion batteries.
Atom Probe Tomography (APT) is a new material analysis technique that provides three-dimensional (3D) chemical and spatial maps at the atomic scale.
APT is unique in its ability to obtain chemical distributions across grain boundaries, heterojunctions, thin films and buried interfaces for metallic systems, ceramics, semiconductors and oxides. Identifying the location and concentration of chemical species is important as they directly affect performance and longevity.
APT also enables 3D analysis of low atomic number (Z) elements such as H, B and Li which cannot be carried out with other advanced analytical techniques such as STEM-EDS (scanning transmission electron microscopy- energy dispersive x-ray spectroscopy) and SIMS (secondary ion mass spectrometry).
Read More: https://www.eag.com/techniques/imaging/atom-probe-tomography-apt/ https://www.eag.com/wp-content/uploads/2020/10/M-052520-APT-technique-note_w.pdf https://www.eag.com/webinar/apt-smart-chart-webinar/