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Atomic Layer Deposition of 2D Dichalcogenides at Wafer Scale

April 26, 2023 @ 11:30 am - April 27, 2023 @ 1:20 pm PDT

Nano Journal Club (11:30 am – 12 noon)
Nano Journal Club is hosting a discussion of the article titled:
(https://stats.sender.net/link_click/FRPfAVdc3N_BGeds/dfa65620596de66beb5b39ac6343e192)
https://stats.sender.net/link_click/FRPfAVdc3N_BGeds/dfa65620596de66beb5b39ac6343e192
Attendees are encouraged to participate in the Nano Journal Club discussion. You can access the paper using the embedded link.
Seminar (12:10 pm – 12:55 pm):
Atomic Layer Deposition of 2D Dichalcogenides at Wafer Scale
2D Transition metal dichalcogenide (TMD) materials have opened a route to continue the down-scaling trend of semiconductor technology.
The synthesis of conformal high quality 2D TMDs on 300 mm wafers is required to unlock the potential application of these materials in electronic devices. EMD Electronics is establishing a platform for TMD development using atomic layer deposition (ALD).
The talk will be focusing on 300 mm wafer-scale ALD deposition of TMD materials at temperatures ranging from 350 to 600 °C. The proposed ALD approach contributes to the efforts in developing high-quality 2D TMD materials that offer high performance and meet the down-scaling demand.
In the past 3 years, Thong and the EMD Electronics Team at San Jose have been developing an ALD 2D materials platform focusing on TMDs for high mobility channel and Cu barrier/liner applications
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Dr. Thong Ngo is an R&D engineer at EMD Electronics.
Thong finished his Ph.D. in Chemical Engineering from The University of Texas at Austin in 2015. His Ph.D. work explored functional crystalline oxides on Si and Ge for electronics using atomic layer deposition (ALD).
Thong joined Intermolecular Inc., a subsidiary of EMD Electronics, in 2015 where he has been working on materials process development, characterization, and integration for memory applications.
Hybrid Event
This will be a Hybrid Event {In-Person & Zoom linked]
Those planning to attend in person should arrive early. They will need to complete an electronic check-in before being admitted into Intermolecular.
Enter the rear of the building from Orchard Parkway. You should park on the back side off of Orchard Parkway.
If you will be unable to arrive in-person before the seminar starts – please plan on joining via Zoom
All ticket registrants will be sent Zoom links before the event. Information will be sent to the email address entered when you register.
Agenda:
Agenda
11:30 AM – 12:00 PM
Nano Journal Club
Lincoln Bourne
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The following paper will be discussed: "Challenges for Nanoscale CMOS Logic Based on 2D Materials"
12:00 PM – 12:10 PM
Introduction; Announcements and Speaker Introduction
Glenn Friedman
12:10 PM – 12:55 PM
Seminar
Thong Ngo
12:55 PM – 1:15 PM
Q & A
Intermolecular Inc, 3011 North First Street, San Jose, California, United States, 95134, Virtual: https://events.vtools.ieee.org/m/357715

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